Semiconductor device with intervening layer and method for fabricating the same

ABSTRACT

The present application relates to a semiconductor device with an intervening layer and a method for fabricating the semiconductor device with the intervening layer. The semiconductor device includes a substrate, a bottom conductive plug positioned on the substrate, an intervening conductive layer positioned on the bottom conductive plug, and a top conductive plug positioned on the intervening conductive layer. A top surface of the intervening conductive layer is non-planar.

TECHNICAL FIELD

The present disclosure relates to a semiconductor device and a methodfor fabricating the semiconductor device, and more particularly, to asemiconductor device with an intervening layer and a method forfabricating the semiconductor device with the intervening layer.

DISCUSSION OF THE BACKGROUND

Semiconductor devices are used in a variety of electronic applications,such as personal computers, cellular telephones, digital cameras, andother electronic equipment. The dimensions of semiconductor devices arecontinuously being scaled down to meet the increasing demand ofcomputing ability. However, a variety of issues arise during thescaling-down process, and such issues are continuously increasing.Therefore, challenges remain in achieving improved quality, yield,performance, and reliability and reduced complexity.

This Discussion of the Background section is provided for backgroundinformation only. The statements in this Discussion of the Backgroundare not an admission that the subject matter disclosed in this sectionconstitutes prior art to the present disclosure, and no part of thisDiscussion of the Background section may be used as an admission thatany part of this application, including this Discussion of theBackground section, constitutes prior art to the present disclosure.

SUMMARY

One aspect of the present disclosure provides a semiconductor deviceincluding a substrate, a bottom conductive plug positioned on thesubstrate, an intervening conductive layer positioned on the bottomconductive plug, and a top conductive plug positioned on the interveningconductive layer. A top surface of the intervening conductive layer isnon-planar.

In some embodiments, a bottom surface of the top conductive plug iscomplementary to the top surface of the intervening conductive layer.

In some embodiments, the top surface of the intervening conductive layeris convex, and the bottom surface of the top conductive plug is concave.

In some embodiments, the top surface of the intervening conductive layeris concave, and the bottom surface of the top conductive plug is convex.

In some embodiments, a bottom surface of the intervening conductivelayer is substantially planar, and sidewalls of the interveningconductive layer are tapered along a vertical direction.

In some embodiments, an angle between the sidewalls of the interveningconductive layer and the bottom surface of the intervening conductivelayer is between 60 degree and about 80 degree.

In some embodiments, the intervening conductive layer is formed of metalsilicide.

In some embodiments, a width of the intervening conductive layer isequal to or less than a width of the bottom conductive plug.

In some embodiments, a width of the top conductive plug is equal to orless than the width of the intervening conductive layer.

In some embodiments, an aspect ratio of the bottom conductive plug isless than about 1:4.

In some embodiments, an aspect ratio of the top conductive plug is lessthan about 1:4.

In some embodiments, a ratio of a radius of curvature of the top surfaceof the intervening conductive layer to a height of the interveningconductive layer is between about 1:1 and about 1:4.

In some embodiments, a ratio of the height of the intervening conductivelayer to a height of the top conductive plug is between about 1:3 andabout 1:6.

In some embodiments, the intervening conductive layer includes a lowerportion positioned on the bottom conductive plug and an upper portionpositioned on the lower portion. A top surface of the upper portion isconcave, and a bottom surface of the upper portion is concave.

In some embodiments, a central line of the top conductive plug is offsetfrom a central line of the intervening conductive layer.

Another aspect of the present disclosure provides a method forfabricating a semiconductor device including providing a substrate,forming a bottom conductive plug on the substrate, forming asemiconductor layer on the bottom conductive plug, rounding a topsurface of the semiconductor layer, turning the semiconductor layer intoan intervening conductive layer, and forming a top conductive plug onthe intervening conductive layer.

In some embodiments, the semiconductor layer is formed ofpolycrystalline silicon, polycrystalline germanium, or polycrystallinesilicon-germanium.

In some embodiments, the intervening conductive layer is formed of metalsilicide.

In some embodiments, the step of turning the semiconductor layer intothe intervening conductive layer includes forming a layer of conductivematerial covering the semiconductor layer, and performing a thermaltreatment to react the layer of conductive material with thesemiconductor layer and turn the semiconductor layer into theintervening conductive layer.

In some embodiments, an anisotropic etch process is performed to roundthe top surface of the semiconductor layer.

Due to the design of the semiconductor device of the present disclosure,the semiconductor device including the intervening conductive layers mayhave greater pattern density. In addition, the non-planar top surface ofthe intervening conductive layers may also reduce the contact resistancebetween the intervening conductive layers and the top conductive plugs.Accordingly, the power consumption of the semiconductor device may bereduced. As a result, the performance of the semiconductor device may beimproved.

The foregoing has outlined rather broadly the features and technicaladvantages of the present disclosure in order that the detaileddescription of the disclosure that follows may be better understood.Additional features and advantages of the disclosure will be describedhereinafter, and form the subject of the claims of the disclosure. Itshould be appreciated by those skilled in the art that the conceptionand specific embodiment disclosed may be readily utilized as a basis formodifying or designing other structures or processes for carrying outthe same purposes of the present disclosure. It should also be realizedby those skilled in the art that such equivalent constructions do notdepart from the spirit and scope of the disclosure as set forth in theappended claims.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It shouldbe noted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIG. 1 illustrates, in a schematic cross-sectional view diagram, asemiconductor device in accordance with one embodiment of the presentdisclosure;

FIGS. 2 to 8 illustrate, in a schematic cross-sectional view diagrams,semiconductor device in accordance with some embodiments of the presentdisclosure;

FIG. 9 illustrates, in a flowchart diagram form, a method forfabricating a semiconductor device in accordance with one embodiment ofthe present disclosure;

FIGS. 10 to 15 illustrate, in schematic cross-sectional view diagrams,part of a flow for fabricating the semiconductor device in accordancewith one embodiment of the present disclosure;

FIG. 16 is a close-up diagram of FIG. 15 ;

FIGS. 17 and 18 illustrate, in schematic cross-sectional view diagrams,part of the flow for fabricating the semiconductor device in accordancewith one embodiment of the present disclosure;

FIGS. 19 to 22 illustrate, in schematic cross-sectional view diagrams,part of a flow for fabricating the semiconductor device in accordancewith another embodiment of the present disclosure;

FIGS. 23 to 26 illustrate, in schematic cross-sectional view diagrams,part of a flow for fabricating the semiconductor device in accordancewith another embodiment of the present disclosure;

FIGS. 27 to 31 illustrate, in schematic cross-sectional view diagrams,part of a flow for fabricating the semiconductor device in accordancewith another embodiment of the present disclosure.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

It should be understood that when an element or layer is referred to asbeing “connected to” or “coupled to” another element or layer, it can bedirectly connected to or coupled to another element or layer, orintervening elements or layers may be present.

It should be understood that, although the terms first, second, etc. maybe used herein to describe various elements, these elements should notbe limited by these terms. Unless indicated otherwise, these terms areonly used to distinguish one element from another element. Thus, forexample, a first element, a first component or a first section discussedbelow could be termed a second element, a second component or a secondsection without departing from the teachings of the present disclosure.

Unless the context indicates otherwise, terms such as “same,” “equal,”“planar,” or “coplanar,” as used herein when referring to orientation,layout, location, shapes, sizes, amounts, or other measures do notnecessarily mean an exactly identical orientation, layout, location,shape, size, amount, or other measure, but are intended to encompassnearly identical orientation, layout, location, shapes, sizes, amounts,or other measures within acceptable variations that may occur, forexample, due to manufacturing processes. The term “substantially” may beused herein to reflect this meaning. For example, items described as“substantially the same,” “substantially equal,” or “substantiallyplanar,” may be exactly the same, equal, or planar, or may be the same,equal, or planar within acceptable variations that may occur, forexample, due to manufacturing processes.

In the present disclosure, a semiconductor device generally means adevice which can function by utilizing semiconductor characteristics,and an electro-optic device, a light-emitting display device, asemiconductor circuit, and an electronic device are all included in thecategory of the semiconductor device.

It should be noted that, in the description of the present disclosure,above (or up) corresponds to the direction of the arrow of the directionZ, and below (or down) corresponds to the opposite direction of thearrow of the direction Z.

FIG. 1 illustrates, in a schematic cross-sectional view diagram, asemiconductor device 1A in accordance with one embodiment of the presentdisclosure.

With reference to FIG. 1 , the semiconductor device 1A may include asubstrate 101, a first insulating layer 103, a second insulating layer105, bottom conductive plugs 201, top conductive plugs 203, andintervening conductive layers 301.

With reference to FIG. 1 , in some embodiments, the substrate 101 may bea bulk semiconductor substrate that is composed entirely of at least onesemiconductor material; the bulk semiconductor substrate does notcontain any dielectrics, insulating layers, or conductive features. Thebulk semiconductor substrate may be formed of, for example, anelementary semiconductor, such as silicon or germanium; a compoundsemiconductor, such as silicon germanium, silicon carbide, galliumarsenide, gallium phosphide, indium phosphide, indium arsenide, indiumantimonide, or other III-V compound semiconductor or II-VI compoundsemiconductor; or combinations thereof.

In some embodiments, the substrate 101 may include asemiconductor-on-insulator structure which consisting of, from bottom totop, a handle substrate, an insulator layer, and a topmost semiconductormaterial layer. The handle substrate and the topmost semiconductormaterial layer may be formed of a same material as the bulksemiconductor substrate aforementioned. The insulator layer may be acrystalline or non-crystalline dielectric material such as an oxideand/or nitride. For example, the insulator layer may be a dielectricoxide such as silicon oxide. For another example, the insulator layermay be a dielectric nitride such as silicon nitride or boron nitride.For yet another example, the insulator layer may include a stack of adielectric oxide and a dielectric nitride such as a stack of, in anyorder, silicon oxide and silicon nitride or boron nitride. The insulatorlayer may have a thickness between about 10 nm and 200 nm.

In some embodiments, the substrate 101 may include dielectrics,insulating layers, or conductive features disposed on the bulksemiconductor substrate or the topmost semiconductor material layer. Thedielectrics or the insulating layers may be formed of, for example,silicon oxide, borophosphosilicate glass, undoped silicate glass,fluorinated silicate glass, low-k dielectric materials, the like, or acombination thereof. Each of the dielectrics or each of the insulatinglayers may have a thickness between about 0.5 micrometer and about 3.0micrometer. The low-k dielectric materials may have a dielectricconstant less than 3.0 or even less than 2.5. The conductive featuresmay be conductive lines, conductive vias, conductive contacts, or thelike.

In some embodiments, device elements (not shown) may be disposed in thesubstrate 101. The device elements may be, for example, bipolar junctiontransistors, metal-oxide-semiconductor field effect transistors, diodes,system large-scale integration, flash memories, dynamic random-accessmemories, static random-access memories, electrically erasableprogrammable read-only memories, image sensors, micro-electro-mechanicalsystem, active devices, or passive devices. The device elements may beelectrically insulated from neighboring device elements by insulatingstructures such as shallow trench isolation.

With reference to FIG. 1 , the first insulating layer 103 may bedisposed on the substrate 101. The first insulating layer 103 may beformed of, for example, silicon oxide, borophosphosilicate glass,undoped silicate glass, fluorinated silicate glass, low-k dielectricmaterials, the like, or a combination thereof. The first insulatinglayer 103 have a thickness between about 0.5 micrometer and about 3.0micrometer.

With reference to FIG. 1 , the second insulating layer 105 may bedisposed on the first insulating layer 103. The second insulating layer105 may be formed of, for example, silicon oxide, borophosphosilicateglass, undoped silicate glass, fluorinated silicate glass, low-kdielectric materials, the like, or a combination thereof. The secondinsulating layer 105 have a thickness between about 0.5 micrometer andabout 3.0 micrometer.

With reference to FIG. 1 , the bottom conductive plugs 201 may bedisposed in the first insulating layer 103. For convenience ofdescription, only one bottom conductive plug 201 is described. The topsurface 201TS of the bottom conductive plug 201 is substantiallycoplanar with the top surface 103TS. The bottom surface 201BS of thebottom conductive plug 201 may be substantially coplanar with the topsurface 101TS of the substrate 101. In other words, the height H1 of thebottom conductive plug 201 may be equal to the height of the firstinsulating layer 103. A ratio of the width W1 of the bottom conductiveplug 201 to the height H1 of the bottom conductive plug 201 (i.e., theaspect ratio of the bottom conductive plug 201) may be less than about1:4; specifically, may be less than 1:2. The bottom conductive plug 201may be formed of, for example, tungsten, cobalt, zirconium, tantalum,titanium, aluminum, ruthenium, copper, metal carbides (e.g., tantalumcarbide, titanium carbide, tantalum magnesium carbide), metal nitrides(e.g., titanium nitride), transition metal aluminides, or combinationsthereof.

It should be noted that, in the description of the present disclosure, a“height” refers to a vertical size of an element (e.g., a layer, plug,trench, hole, opening, etc.) in a cross-sectional perspective measuredfrom a top surface to a bottom surface of the element; a “width” refersto a size of an element (e.g., a layer, plug, trench, hole, opening,etc.) in a cross-sectional perspective measured from a side surface toan opposite surface of the element. The term “thickness” may substitutefor “width” and/or “height” where indicated.

With reference to FIG. 1 , the intervening conductive layers 301 may berespectively correspondingly disposed on the bottom conductive plugs 201and may be disposed in the second insulating layer 105. For convenienceof description, only one intervening conductive layer 301 is described.In some embodiments, the top surface 301TS of the intervening conductivelayer 301 may be non-planar. Specifically, in the embodiment depicted,the top surface 301TS of the intervening conductive layer 301 is convex.The convex top surface 301TS of the intervening conductive layer 301 mayincrease the contact surface between the intervening conductive layer301 and the top conductive plug 203 as will be illustrated later. Thebottom surface 301BS of the intervening conductive layer 301 may besubstantially planar and may be substantially coplanar with the topsurface 103TS of the first insulating layer 103.

In some embodiments, in a cross-sectional perspective, the interveningconductive layer 301 may have a semi-circular cross-sectional profile ora semi-oval cross-sectional profile. In some embodiments, theintervening conductive layer 301 may be tapered along the direction Z.The width W2 of the intervening conductive layer 301 may be graduallydecrease from bottom to top. In some embodiments, the width. W2 of theintervening conductive layer 301 may be equal to or less than the widthW1 of the bottom conductive plug 201.

It should be noted that, in the description of the present disclosure, asurface is “substantially planar” if there exists a horizontal planefrom which the surface does not deviate by more than three times theroot mean square roughness of the surface.

In some embodiments, the intervening conductive layer 301 may be formedof, for example, metal silicide. Metal silicide may be, for example,titanium silicide, nickel silicide, nickel platinum silicide, tantalumsilicide, or cobalt silicide. In some embodiments, the interveningconductive layer 301 may include impurities such as phosphorus, arsenic,antimony, or boron.

With reference to FIG. 1 , the top conductive plugs 203 may berespectively correspondingly disposed on the intervening conductivelayers 301 and may be disposed in the second insulating layer 105. Forconvenience of description, only one top conductive plug 203 isdescribed. The top surface 203TS of the top conductive plug 203 may besubstantially coplanar with the top surface 105TS of the secondinsulating layer 105. A width. W3 of the top conductive plug 203 may beequal to or less than the width W2 of the intervening conductive layer301. The bottom surface 203BS of the top conductive plug 203 may benon-planar and may be complementary to the top surface 301TS of theintervening conductive layer 301. In the embodiment depicted, the bottomsurface 203BS of the top conductive plug 203 is concave.

In some embodiments, a ratio of the height H2 of the interveningconductive layer 301 to the height H3 of the top conductive plug 203 maybe between about 1:3 and about 1:6. In some embodiments, a ratio of thewidth W3 of the top conductive plug 203 to the height H3 of the topconductive plug 203 (i.e., the aspect ratio of the top conductive plug203) may be less than about 1:4; specifically, may be less than 1:2. Insome embodiments, the central line CL1 of the top conductive plug 203may be aligned with the central line CL2 of the intervening conductivelayer 301. In other words, the top conductive plug 203 may besymmetrically disposed on the intervening conductive layer 301.

The top conductive plugs 203 may be formed of, for example, tungsten,cobalt, zirconium, tantalum, titanium, aluminum, ruthenium, copper,metal carbides (e.g., tantalum carbide, titanium carbide, tantalummagnesium carbide), metal nitrides (e.g., titanium nitride), transitionmetal aluminides, or combinations thereof.

In some embodiments, the bottom conductive plug 201, the interveningconductive layer 301, and the top conductive plug 203 may together toelectrically connect a device element disposed above the secondinsulating layer 105 and a device element disposed in the substrate 101.For example, the bottom conductive plug 201, the intervening conductivelayer 301, and the top conductive plug 203 may together to serve as abit line contact in a dynamic random-access memory.

Conventionally, in order to electrically connect a device elementdisposed above the second insulating layer 105 and a device elementdisposed in the substrate 101, a conventional plug, disposed along thesecond insulating layer 105 and the first insulating layer 103, may beemployed to electrically connect aforementioned device elements.However, as the dimensions of semiconductor devices are continuouslybeing scaled down, the height of the conventional plug remains the samewhile the width of the conventional plug is continuously decreased. As aresult, the aspect ratio of the conventional plug may be, for example,greater than 1:6, even greater than 1:8 which make fabrication of suchconventional plug difficult.

To overcome such issue, the conventional plug may be split into twoplugs, which fabricate separately, to avoid the high aspect ratiosituation of the conventional plug, and a pad having width greater thanthat of the two plugs have to dispose between the two plugs to ensurethe electrically connection of the two plugs. However, the greater widthpad may be a limitation of the design rule when the dimensions ofsemiconductor devices are continuously being scaled down.

In contrast, in the embodiment depicted, the semiconductor device 1Aemploys the intervening conductive layers 301, which have about the samewidth comparing to the widths of the bottom conductive plugs 201 and thetop conductive plugs 203, to electrically connect the bottom conductiveplugs 201 and the top conductive plugs 203; therefore, the patterndensity of the semiconductor device 1A may be increased. In addition,the non-planar top surfaces 301TS of the intervening conductive layers301 may decrease the contact resistance between the top conductive plugs203 and the intervening conductive layers 301 which can ensure theelectrically connection thereof and can reduce the power consumption ofthe semiconductor device 1A.

FIGS. 2 to 8 illustrate, in a schematic cross-sectional view diagrams,semiconductor device 1B, 1C, 1D, 1E, 1F, 1G, and 1H in accordance withsome embodiments of the present disclosure.

With reference to FIG. 2 , the semiconductor device 1B may have astructure similar to that illustrated in FIG. 1 . The same or similarelements in FIG. 2 as in FIG. 1 have been marked with similar referencenumbers and duplicative descriptions have been omitted.

With reference to FIG. 2 , the intervening conductive layer 301 mayinclude an outer portion 301-1 and a center portion 301-3. The centerportion 301-3 may be disposed on the bottom conductive plug 201 and mayhave a semi-circular cross-sectional profile or a semi-ovalcross-sectional profile. The outer portion 301-1 may be disposedcovering the top surface 301-3TS of the center portion 301-3 and mayhave a circular arc cross-sectional profile. The top surface 301-1TS andthe bottom surface 301-1BS of the outer portion 301-1 may be convex. Thetwo ends 301-1E of the outer portion 301-1, the bottom surface 301-3BSof the center portion 301-3, and the top surface 103TS of the firstinsulating layer 103 may be substantially coplanar. The outer portion301-1 may have an approximately uniform thickness. The top conductiveplug 203 may be disposed on the top surface 301-1TS of the outer portion301-1.

The outer portion 301-1 of the intervening conductive layer 301 may beformed of, for example, metal silicide. In some embodiments, the outerportion 301-1 of the intervening conductive layer 301 may includeimpurities such as phosphorus, arsenic, antimony, or boron. The centerportion 301-3 of the intervening conductive layer 301 may be formed of,for example, polycrystalline silicon, polycrystalline germanium,polycrystalline silicon-germanium, or the like. In some embodiments, thecenter portion 301-3 of the intervening conductive layer 301 may includeimpurities such as phosphorus, arsenic, antimony, or boron.

With reference to FIG. 3 , the semiconductor device 1C may have astructure similar to that illustrated in FIG. 1 . The same or similarelements in FIG. 3 as in FIG. 1 have been marked with similar referencenumbers and duplicative descriptions have been omitted.

With reference to FIG. 3 , the intervening conductive layer 301 may havea triangular cross-sectional profile. The sidewalls 301SW of theintervening conductive layer 301 may be tapered along the direction Z.The width W2 of the intervening conductive layer 301 may graduallydecrease from bottom to top along the direction Z. The sidewalls 301SWof the intervening conductive layer 301 may have <111> crystalorientation. The angle α between the sidewalls 301SW of the interveningconductive layer 301 and the bottom surface 301BS of the interveningconductive layer 301 may be between about 60 degree and about 80 degree.

With reference to FIG. 4 , the semiconductor device 1D may have astructure similar to that illustrated in FIG. 3 . The same or similarelements in FIG. 4 as in FIG. 3 have been marked with similar referencenumbers and duplicative descriptions have been omitted.

With reference to FIG. 4 , the intervening conductive layer 301 mayinclude an upper portion 301-5 and a lower portion 301-7. The lowerportion 301-7 may be disposed on the bottom conductive plug 201 and mayhave a triangular cross-sectional profile. The upper portion 301-5 maybe disposed covering the top surface 301-7TS of the lower portion 301-7and may have an inverted V-shaped cross-sectional profile. The topsurface 301-5TS and the bottom surface 301-5BS of the upper portion301-5 may be an inverted V-shaped. The two ends 301-5E of the upperportion 301-5, the bottom surface 301-7BS of the lower portion 301-7,and the top surface 103TS of the first insulating layer 103 may besubstantially coplanar. The upper portion 301-5 may have anapproximately uniform thickness. The top conductive plug 203 may bedisposed on the top surface 301-5TS of the upper portion 301-5.

The upper portion 301-5 of the intervening conductive layer 301 may beformed of, for example, metal silicide. In some embodiments, the upperportion 301-5 of the intervening conductive layer 301 may includeimpurities such as phosphorus, arsenic, antimony, or boron. The lowerportion 301-7 of the intervening conductive layer 301 may be formed of,for example, polycrystalline silicon, polycrystalline germanium,polycrystalline silicon-germanium, or the like. In some embodiments, thelower portion 301-7 of the intervening conductive layer 301 may includeimpurities such as phosphorus, arsenic, antimony, or boron.

With reference to FIG. 5 , the semiconductor device 1E may have astructure similar to that illustrated in FIG. 1 . The same or similarelements in FIG. 5 as in FIG. 1 have been marked with similar referencenumbers and duplicative descriptions have been omitted.

With reference to FIG. 5 , a third insulating layer 107 may be disposedbetween the first insulating layer 103 and the second insulating layer105. The third insulating layer 107 may be formed of a same material asthe second insulating layer 105 but is not limited thereto. Theintervening conductive layers 301 may be disposed in the thirdinsulating layer 107. The top surface 301TS of the interveningconductive layer 301 may be concave. The bottom surface 203BS of the topconductive plug 203 may be convex.

With reference to FIG. 6 , the semiconductor device 1F may have astructure similar to that illustrated in FIG. 5 . The same or similarelements in FIG. 6 as in FIG. 5 have been marked with similar referencenumbers and duplicative descriptions have been omitted.

With reference to FIG. 6 , the intervening conductive layer 301 mayinclude an upper portion 301-5 and a lower portion 301-7. The lowerportion 301-7 may be disposed on the bottom conductive plug 201. The topsurface 301-7TS of the lower portion 301-7 may be concave. The upperportion 301-5 may be disposed on the top surface 301-7TS of the lowerportion 301-7 and may have a circular arc cross-sectional profile. Thetop surface 301-5TS and the bottom surface 301-5BS of the upper portion301-5 may be concave. The bottom surface 301-7BS of the lower portion301-7 and the top surface 103TS of the first insulating layer 103 may besubstantially coplanar. The upper portion 301-5 may have anapproximately uniform thickness. The top conductive plug 203 may bedisposed on the top surface 301-5TS of the upper portion 301-5.

The upper portion 301-5 of the intervening conductive layer 301 may beformed of, for example, metal silicide. In some embodiments, the upperportion 301-5 of the intervening conductive layer 301 may includeimpurities such as phosphorus, arsenic, antimony, or boron. The lowerportion 301-7 of the intervening conductive layer 301 may be formed of,for example, polycrystalline silicon, polycrystalline germanium,polycrystalline silicon-germanium, or the like. In some embodiments, thelower portion 301-7 of the intervening conductive layer 301 may includeimpurities such as phosphorus, arsenic, antimony, or boron.

With reference to FIG. 7 , the semiconductor device 1G may have astructure similar to that illustrated in FIG. 1 . The same or similarelements in FIG. 7 as in FIG. 1 have been marked with similar referencenumbers and duplicative descriptions have been omitted.

With reference to FIG. 7 , the bottom conductive plug 201 may include aplurality of first conductive layers 201-1, 201-3, 201-5 and a pluralityof second conductive layers 201-2, 201-4, 201-6. The plurality of firstconductive layers 201-1, 201-3, 201-5 and the plurality of secondconductive layers 201-2, 201-4, 201-6 may be alternatively stacked.

In some embodiments, the plurality of first conductive layers 201-1,201-3, 201-5 and the plurality of second conductive layers 201-2, 201-4,201-6 may have different stress states. For example, the plurality offirst conductive layers 201-1, 201-3, 201-5 may have tensile stress andthe plurality of second conductive layers 201-2, 201-4, 201-6 may havecompressive stress, or vice versa. The plurality of first conductivelayers 201-1, 201-3, 201-5 and the plurality of second conductive layers201-2, 201-4, 201-6 may be formed including, for example, titanium,titanium nitride, ruthenium, molybdenum, chromium, vanadium, palladium,platinum, rhodium, scandium, aluminum, niobium, niobium nitride,tungsten, tungsten nitride, tantalum, tantalum nitride, or silicidesthereof.

The stress states of the plurality of first conductive layers 201-1,201-3, 201-5 and the plurality of second conductive layers 201-2, 201-4,201-6 may be controlled by forming the plurality of first conductivelayers 201-1, 201-3, 201-5 and the plurality of second conductive layers201-2, 201-4, 201-6 with different materials. Specifically, theplurality of first conductive layers 201-1, 201-3, 201-5 are formed of amaterial having a higher stress state and the plurality of secondconductive layers 201-2, 201-4, 201-6 are formed a material having alower stress state. The plurality of second conductive layers 201-2,201-4, 201-6 having lower stress state may have thicker thicknesses thanthe plurality of first conductive layers 201-1, 201-3, 201-5 havinghigher stress state to compensate for the stress of the plurality offirst conductive layers 201-1, 201-3, 201-5 having higher stress state.Specifically, the plurality of first conductive layers 201-1, 201-3,201-5 may have thicknesses between about 5 nm and 50 nm. The pluralityof second conductive layers 201-2, 201-4, 201-6 may have thicknessesbetween about 10 nm and about 150 nm.

In some embodiments, the plurality of first conductive layers 201-1,201-3, 201-5 may be large grain layers and the plurality of plurality ofsecond conductive layers 201-2, 201-4, 201-6 may be buffer layers. Thelarge grain layers and the buffer layers may be formed including, forexample, titanium, titanium nitride, ruthenium, molybdenum, chromium,vanadium, palladium, platinum, rhodium, scandium, aluminum, niobium,niobium nitride, tungsten, tungsten nitride, tantalum, tantalum nitride,tantalum oxide, or silicides thereof. For example, the large grainlayers may be formed of a pure metal (e.g., tantalum) and the bufferlayers may be formed of the metal nitride (e.g., tantalum nitride) ormetal oxide (e.g., tantalum oxide) versions of the pure metal. The largegrain layers may have thicknesses between about 10 nm and about 30 nm.The buffer layers may have thicknesses between about 1 nm and about 5nm. The buffer layers may block crystal structures of underlying largegrain layers from extending upward in the direction Z to prevent thepropagation of grain structure through the bottom conductive plug 201.As a result, the stress of the bottom conductive plug 201 may be reducedand the wafer bowing may be reduced or avoided.

With reference to FIG. 7 , the spacers 205 may be disposed on thesidewalls of the bottom conductive plug 201. The spacers 205 may beformed of, for example, silicon oxide, silicon nitride, silicon carbonnitride, silicon nitride oxide, or silicon oxynitride. The spacers 205may electrically isolate the bottom conductive plug 201 from neighboringconductive elements disposed adjacent to two sides of the bottomconductive plug 201. In some embodiments, the spacers 205 may beoptional.

It should be noted that, in the description of the present disclosure,silicon oxynitride refers to a substance which contains silicon,nitrogen, and oxygen and in which a proportion of oxygen is greater thanthat of nitrogen. Silicon nitride oxide refers to a substance whichcontains silicon, oxygen, and nitrogen and in which a proportion ofnitrogen is greater than that of oxygen.

With reference to FIG. 8 , the semiconductor device 1H may have astructure similar to that illustrated in FIG. 1 . The same or similarelements in FIG. 8 as in FIG. 1 have been marked with similar referencenumbers and duplicative descriptions have been omitted.

With reference to FIG. 8 , the central line CL1 of the top conductiveplug 203 may be offset from the central line CL2 of the interveningconductive layer 301. In other words, the top conductive plug 203 may beasymmetrically disposed on the intervening conductive layer 301. Thenon-planar top surface 301TS of the intervening conductive layer 301 mayincrease the contact surface between the top conductive plugs 203 andthe intervening conductive layers 301.

As the contact resistance between the top conductive plugs 203 and theintervening conductive layers 301 is inversely proportional to thecontact surface between the top conductive plugs 203 and the interveningconductive layers 301. Even the top conductive plug 203 may beasymmetrically disposed on the intervening conductive layer 301, thenon-planar top surface 301TS of the intervening conductive layer 301 canstill provide solid electrically connection between the top conductiveplugs 203 and the intervening conductive layers 301 due to low contactresistance originating from the non-planar top surface 301TS of theintervening conductive layer 301. In other words, the non-planar topsurface 301TS of the intervening conductive layer 301 may enlarge thetolerance window for the photolithography process during the fabricationof the top conductive plugs 203. As a result, the yield of fabricationof the semiconductor device 1H may be increased.

It should be noted that the functions or steps noted herein may occur inan order different from the order noted in the figures. For example, twofigures shown in succession may in fact be executed substantiallyconcurrently or may sometimes be executed in a reversed order, dependingupon the functionalities or steps involved.

It should be noted that the terms “forming,” “formed” and “form” maymean and include any method of creating, building, patterning,implanting, or depositing an element, a dopant or a material. Examplesof forming methods may include, but are not limited to, atomic layerdeposition, chemical vapor deposition, physical vapor deposition,sputtering, co-sputtering, spin coating, diffusing, depositing, growing,implantation, photolithography, dry etching, and wet etching.

FIG. 9 illustrates, in a flowchart diagram form, a method 10 forfabricating a semiconductor device 1A in accordance with one embodimentof the present disclosure. FIGS. 10 to 15 illustrate, in schematiccross-sectional view diagrams, part of a flow for fabricating thesemiconductor device 1A in accordance with one embodiment of the presentdisclosure. FIG. 16 is a close-up diagram of FIG. 15 . FIGS. 17 and 18illustrate, in schematic cross-sectional view diagrams, part of the flowfor fabricating the semiconductor device 1A in accordance with oneembodiment of the present disclosure.

With reference to FIGS. 9 to 13 , at step S11, a substrate 101 may beprovided, a first insulating layer 103 may be formed on the substrate101, bottom conductive plugs 201 may be formed in the first insulatinglayer 103, and semiconductor layers 407 may be formed on the bottomconductive plugs 201.

With reference to FIG. 10 , the first insulating layer 103 may be formedon the substrate 101 by a deposition process such as chemical vapordeposition, plasma enhanced chemical vapor deposition, low pressurechemical vapor deposition, or the like. The bottom conductive plugs 201may be formed in the first insulating layer 103 by a damascene process.

With reference to FIG. 10 , a layer of semiconductor material 401 may beformed on the first insulating layer 103. A first hard mask layer 403may be formed on the layer of semiconductor material 401. Thesemiconductor material 401 may be, for example, polycrystalline silicon,polycrystalline germanium, polycrystalline silicon-germanium, or thelike. In some embodiments, the layer of semiconductor material 401 maybe doped with impurities such as phosphorus, arsenic, antimony, orboron. The first hard mask layer 403 may be formed of, for example,silicon oxide, silicon nitride, silicon oxynitride, silicon nitrideoxide, the like, or a combination thereof. The layer of semiconductormaterial 401 and the first hard mask layer 403 may be formed bydeposition processes such as chemical vapor deposition, plasma enhancedchemical vapor deposition, low pressure chemical vapor deposition, orthe like.

With reference to FIG. 10 , the first mask layer 405 may be formed onthe first hard mask layer 403. The first mask layer 405 may be aphotoresist layer. The first mask layer 405 may be patterned to definethe pattern of the semiconductor layers 407.

With reference to FIG. 11 , a hard mask etch process may be performed toremove portions of the first hard mask layer 403 and transfer thepattern of the first mask layer 405 onto the first hard mask layer 403.The etch rate of the first mask layer 405 of the hard mask etch processmay be faster than the etch rate of the layer of semiconductor material401 of the hard mask etch process. For example, an etch rate ratio ofthe first mask layer 405 to the layer of semiconductor material 401 maybe between about 100:1 and about 1.05:1 during the hard mask etchprocess. For another example, the etch rate ratio of the first masklayer 405 to the layer of semiconductor material 401 may be betweenabout 100:1 and about 10:1 during the hard mask etch process. After thehard mask etch process, the first mask layer 405 may be removed.

With reference to FIG. 12 , a main etch process may be performed toremove portions of the layer of semiconductor material 401 and turn thelayer of semiconductor material 401 into the semiconductor layers 407. Apressure of the main etch process may be between about 2 mTorr and about10 mTorr. A source power of the main etch process may be between about300 W and about 450 W. A bias power of the main etch process may bebetween about 20 W and about 150 W. In some embodiments, the main etchprocess may performed with gasses such as oxygen, chlorine,fluorocarbon, and hydrogen bromide. The etch rate of the layer ofsemiconductor material 401 of the main etch process may be faster thanthe etch rate of the first insulating layer 103 of the main etchprocess. For example, an etch rate ratio of the layer of semiconductormaterial 401 to the first insulating layer 103 may be between about100:1 and about 1.05:1 during the main etch process. For anotherexample, the etch rate ratio of the layer of semiconductor material 401to the first insulating layer 103 may be between about 100:1 and about10:1 during the main etch process.

During the main etch process, the first hard mask layer 403 may begradually etched, and the ends of the top surface of the first hard masklayer 403 may be chamfered by collision with etching species. The endsof the top surface of the first hard mask layer 403 may be referred toas chamfered edges 403C hereinafter. Each of the chamfered edges 403C ofthe first hard mask layer 403 may have taper angle about 45 degree. Themain etch process may be, for example, an anisotropic etch process.

With reference to FIG. 13 , an over etch process may be performed. Apressure of the over etch process may be between about 5 Pa and about 20Pa. A power of the over etch process may be between about 100 W andabout 200 W. In some embodiments, the over etch process may performedwith gasses such as oxygen and fluoroform. Due to the edge corners ofthe top surfaces 407TS of the semiconductor layers 407 may be etchedfaster than flat center portions of the top surfaces 407TS of thesemiconductor layers 407 and the semiconductor layers 407 may be etchedaccording to the shape of the chamfered edge 403C of the first hard masklayer 403, the top surfaces 407TS of the semiconductor layers 407 may berounded by the over etch process. The over etch process may be, forexample, an anisotropic etch process.

With reference to FIG. 9 and FIGS. 14 to 16 , at step S13, thesemiconductor layers 407 may be turned into intervening conductivelayers 301.

With reference to FIG. 14 , a layer of conductive material 409 may beformed over the intermediate semiconductor device illustrated in FIG. 13. The layer of conductive material 409 may include, for example,titanium, nickel, platinum, tantalum, or cobalt.

With reference to FIG. 15 , a thermal treatment may be performed. Duringthe thermal treatment, metal atoms of the layer of conductive material409 may react chemically with silicon atoms of the semiconductor layers407 to form the intervening conductive layers 301. The interveningconductive layers 301 may include metal silicide such as titaniumsilicide, nickel silicide, nickel platinum silicide, tantalum silicide,or cobalt silicide. The thermal treatment may be a dynamic surfaceannealing process. After the thermal treatment, a cleaning process maybe performed to remove the unreacted conductive material 409. Thecleaning process may use etchant such as hydrogen peroxide and an SC-1solution. The shape of the intervening conductive layers 301 mayinherited from the semiconductor layers 407. That is, the interveningconductive layers 301 may have rounded top surface 301TS.

With reference to FIG. 16 , for each of the intervening conductivelayers 301, a ratio of the radius of curvature R1 of the top surface301TS of the intervening conductive layer 301 to the height H2 of theintervening conductive layer 301 may be between about 1:1 and about 1:4.

In some embodiments, only the portions of the semiconductor layers 407exposed to the layer of conductive material 409 may be turned into metalsilicide.

With reference to FIGS. 9, 17, and 18 , at step S15, top conductiveplugs 203 may be formed on the intervening conductive layers 301.

With reference to FIG. 17 , a second insulating layer 105 may be formedto cover the intervening conductive layers 301. A planarization process,such as chemical mechanical polishing, may be performed to provide asubstantially flat surface for subsequent processing steps.Subsequently, plug openings 411 may be formed along the secondinsulating layer 105 by a photolithography-etch process. The topsurfaces 301TS of the intervening conductive layers 301 may be exposedthrough the plug openings 411.

With reference to FIG. 18 , a conductive material such as tungsten,cobalt, zirconium, tantalum, titanium, aluminum, ruthenium, copper,metal carbides, metal nitrides, or transition metal aluminides may bedeposited into the plug openings 411 by a deposition process. After thedeposition process, a planarization process, such as chemical mechanicalpolishing, may be performed to remove excess material, provide asubstantially flat surface for subsequent processing steps, andconformally form the top conductive plugs 203.

FIGS. 19 to 22 illustrate, in schematic cross-sectional view diagrams,part of a flow for fabricating the semiconductor device 1C in accordancewith another embodiment of the present disclosure.

With reference to FIG. 19 , an intermediate semiconductor deviceillustrated in FIG. 12 may be provided. The first hard mask layer 403may be removed.

With reference to FIG. 20 , a wet etching process may be subsequentlyperformed to chamfer the semiconductor layers 407. The wet etch processmay proceeded with a mixture including potassium hydroxide, isopropylalcohol, and water in a temperature between about 80° C. to 82° C.

With reference to FIG. 21 , the chamfered semiconductor layers 407 maybe turned into intervening conductive layers 301 with a proceduresimilar to that illustrated in FIGS. 14 and 15 .

With reference to FIG. 22 , the second insulating layer 105 and the topconductive plugs 203 may be formed with a procedure similar to thatillustrated in FIGS. 17 and 18 .

FIGS. 23 to 26 illustrate, in schematic cross-sectional view diagrams,part of a flow for fabricating the semiconductor device 1E in accordancewith another embodiment of the present disclosure.

With reference to FIG. 23 , an intermediate semiconductor deviceillustrated in FIG. 12 may be provided. The first hard mask layer 403may be removed. A third insulating layer 107 may be formed to cover thesemiconductor layers 407. A planarization process, such as chemicalmechanical polishing, may be performed until the top surfaces 407TS ofthe semiconductor layers 407 are exposed to provide a substantially flatsurface for subsequent processing steps.

With reference to FIG. 24 , an isotropic etch process may be performedto remove portions of the semiconductor layers 407 and make the topsurfaces 407TS of the semiconductor layers 407 concave. The etch rate ofthe semiconductor layers 407 of the isotropic etch process may be fasterthan the etch rate of the third insulating layer 107 of the isotropicetch process. For example, an etch rate ratio of the semiconductorlayers 407 to the third insulating layer 107 may be between about 100:1and about 1.05:1 during the isotropic etch process. For another example,the etch rate ratio of the semiconductor layers 407 to the thirdinsulating layer 107 may be between about 100:1 and about 10:1 duringthe isotropic etch process.

With reference to FIG. 25 , the semiconductor layers 407 having concavetop surfaces may be turned into intervening conductive layers 301 with aprocedure similar to that illustrated in FIGS. 14 and 15 .

With reference to FIG. 26 , the second insulating layer 105 and the topconductive plugs 203 may be formed with a procedure similar to thatillustrated in FIGS. 17 and 18 .

FIGS. 27 to 31 illustrate, in schematic cross-sectional view diagrams,part of a flow for fabricating the semiconductor device 1G in accordancewith another embodiment of the present disclosure.

With reference to FIG. 27 , the substrate 101 may be provided, pluralityof first conductive layers 201-1, 201-3, 201-5 and plurality of secondconductive layers 201-2, 201-4, 201-6 may be alternatively formed on thesubstrate 101, a second hard mask layer 413 may be formed over theplurality of first conductive layers 201-1, 201-3, 201-5 and theplurality of second conductive layers 201-2, 201-4, 201-6, and a secondmask layer 415 may be formed on the second hard mask layer 413. Theplurality of first conductive layers 201-1, 201-3, 201-5 and theplurality of second conductive layers 201-2, 201-4, 201-6 may be formedby chemical vapor deposition, plasma-enhanced chemical vapor deposition,physical vapor deposition, ionized physical vapor deposition, atomiclayer deposition, electroplating, or electroless plating, but are notlimited thereto. It should be noted that the term “stacked layers” maybe used interchangeably with the plurality of first conductive layers201-1, 201-3, 201-5 and plurality of second conductive layers 201-2,201-4, 201-6.

In some embodiments, the plurality of first conductive layers 201-1,201-3, 201-5 and the plurality of second conductive layers 201-2, 201-4,201-6 may have different stress states. For example, the plurality offirst conductive layers 201-1, 201-3, 201-5 may have tensile stress andthe layers of plurality of second conductive layers 201-2, 201-4, 201-6may have compressive stress, or vice versa. The stress states of theplurality of first conductive layers 201-1, 201-3, 201-5 and theplurality of second conductive layers 201-2, 201-4, 201-6 may becontrolled by forming the plurality of first conductive layers 201-1,201-3, 201-5 and the plurality of second conductive layers 201-2, 201-4,201-6 with different materials. Specifically, the plurality of firstconductive layers 201-1, 201-3, 201-5 are formed of a material having ahigher stress state and the plurality of second conductive layers 201-2,201-4, 201-6 are formed a material having a lower stress state. Theplurality of second conductive layers 201-2, 201-4, 201-6 having lowerstress state may have a thicker thickness than the plurality of firstconductive layers 201-1, 201-3, 201-5 having higher stress state tocompensate for the stress of the plurality of first conductive layers201-1, 201-3, 201-5 having higher stress state. Specifically, theplurality of first conductive layers 201-1, 201-3, 201-5 may havethicknesses between about 5 nm and 50 nm. The plurality of secondconductive layers 201-2, 201-4, 201-6 may have thicknesses between about10 nm and about 150 nm.

For another example, the stress states of the stacked layers may becontrolled by forming the stacked layers as nitrides with differentnitrogen levels. Specifically, the plurality of first conductive layers201-1, 201-3, 201-5 may be formed of nitrides having higher nitrogenlevel so as to have a higher stress state due to a more disruptedcrystallization. In contrast, the plurality of second conductive layers201-2, 201-4, 201-6 may be formed of nitrides having lower nitrogenlevel so as to have a lower stress state. The different nitrogen levelsof the stacked layers may be controlled by the amount of the reactantduring the deposition processes of the stacked layers.

The plurality of first conductive layers 201-1, 201-3, 201-5 and theplurality of second conductive layers 201-2, 201-4, 201-6 that havedifferent stress states may cancel the stress of the stacked layers orat least reduce the stress of the stacked layers to a desired amount.Hence, the wafer bowing may be reduced or avoided.

In some embodiments, the plurality of first conductive layers 201-1,201-3, 201-5 may be large grain layers and the plurality of secondconductive layers 201-2, 201-4, 201-6 may be buffer layers. The largegrain layers may have thicknesses between about 10 nm and about 30 nm.The buffer layers may have thicknesses between about 1 nm and about 5nm. The buffer layers may block crystal structures of underlying largegrain layers from extending upward in the direction Z to prevent thepropagation of grain structure through the stacked layers. As a result,the stress of the stacked layers may be reduced. Hence, the wafer bowingmay be reduced or avoided.

The second hard mask layer 413 may be formed of, for example, siliconoxide, silicon nitride, silicon oxynitride, or silicon nitride oxide. Aphotolithography process may be performed to transfer desired pattern tothe second mask layer 415 and define a pattern of the bottom conductiveplugs 201 which will be illustrated later

With reference to FIG. 28 , an etch process may be performed to removethe exposed portion of the second hard mask layer 413 so as to transferthe pattern of the bottom conductive plugs 201 onto the second hard masklayer 413. After the etch process, the second mask layer 415 may beremoved.

With reference to FIG. 29 , an etch process may be subsequentlyperformed to remove the exposed portions of the stacked layers.Depending on the etch selectivity of the plurality of first conductivelayers 201-1, 201-3, 201-5 and the plurality of second conductive layers201-2, 201-4, 201-6 with respect to each other, the etch process may bedone either with the same chemistry to remove both the stacked layers,or cycled between processes tailored to each respective material of theplurality of first conductive layers 201-1, 201-3, 201-5 and theplurality of second conductive layers 201-2, 201-4, 201-6. For example,a fluorine-based etch may be used for removal of the exposed portions ofthe plurality of first conductive layers 201-1, 201-3, 201-5, and achlorine-based etch may be used for removal of the exposed portions ofthe plurality of second conductive layers 201-2, 201-4, 201-6. After theetch process, the remained portions of the stacked layers may togetherform the bottom conductive plugs 201. The second hard mask layer 413 maybe removed after the formation of the bottom conductive plugs 201.

With reference to FIG. 30 , spacers 205 may be formed on sides of thebottom conductive plugs 201. The spacers 205 may be formed by depositingan insulating material covering the bottom conductive plugs 201 andfollowing with an anisotropic etch process to remove portions of theinsulating material. The insulating material may be, for example,silicon oxide, silicon nitride, silicon carbon nitride, silicon nitrideoxide, or silicon oxynitride.

With reference to FIG. 31 , the first insulating layer 103, the secondinsulating layer 105, the intervening conductive layers 301, and the topconductive plugs 203 may be formed with a procedure similar to thatillustrated in FIGS. 10 to 18 . The bottom conductive plugs 201 formedof stacked layers may be more suitable for semiconductor devices havingsmaller technical nodes such as 20 m, 14 nm, 7 nm, or below.

One aspect of the present disclosure provides a semiconductor deviceincluding a substrate, a bottom conductive plug positioned on thesubstrate, an intervening conductive layer positioned on the bottomconductive plug, and a top conductive plug positioned on the interveningconductive layer. A top surface of the intervening conductive layer isnon-planar.

Another aspect of the present disclosure provides a method forfabricating a semiconductor device including providing a substrate,forming a bottom conductive plug on the substrate, forming asemiconductor layer on the bottom conductive plug, rounding a topsurface of the semiconductor layer, turning the semiconductor layer intoan intervening conductive layer, and forming a top conductive plug onthe intervening conductive layer.

Due to the design of the semiconductor device of the present disclosure,the semiconductor device 1A including the intervening conductive layers301 may have greater pattern density. In addition, the non-planar topsurface of the intervening conductive layers 301 may also reduce thecontact resistance between the intervening conductive layers 301 and thetop conductive plugs 203. Accordingly, the power consumption of thesemiconductor device 1A may be reduced. As a result, the performance ofthe semiconductor device 1A may be improved.

Although the present disclosure and its advantages have been describedin detail, it should be understood that various changes, substitutionsand alterations can be made herein without departing from the spirit andscope of the disclosure as defined by the appended claims. For example,many of the processes discussed above can be implemented in differentmethodologies and replaced by other processes, or a combination thereof.

Moreover, the scope of the present application is not intended to belimited to the particular embodiments of the process, machine,manufacture, composition of matter, means, methods and steps describedin the specification. As one of ordinary skill in the art will readilyappreciate from the disclosure of the present disclosure, processes,machines, manufacture, compositions of matter, means, methods, or steps,presently existing or later to be developed, that perform substantiallythe same function or achieve substantially the same result as thecorresponding embodiments described herein may be utilized according tothe present disclosure. Accordingly, the appended claims are intended toinclude within their scope such processes, machines, manufacture,compositions of matter, means, methods, and steps.

What is claimed is:
 1. A semiconductor device, comprising: a substrate;a bottom conductive plug positioned on the substrate; an interveningconductive layer positioned on the bottom conductive plug, wherein theintervening conductive layer includes a first portion and a secondportion deposed between the first portion and the bottom conductiveplug, wherein the first portion comprises metal silicide and the secondportion comprises polycrystalline silicon, polycrystalline germanium, orpolycrystalline silicon-germanium; and a top conductive plug positionedon the first portion of the intervening conductive layer; wherein a topsurface of the first portion of the intervening conductive layer isnon-planar, wherein the non-planar top surface of the first portion ofthe intervening conductive layer is entirely in direct contact with abottom surface of the top conductive plug; wherein maximum widths of thebottom conductive plugs, the intervening conductive layer and the topconductive plugs are substantially equal.
 2. The semiconductor device ofclaim 1, wherein the bottom surface of the top conductive plug iscomplementary to the top surface of the first portion of the interveningconductive layer.
 3. The semiconductor device of claim 2, wherein thetop surface of the first portion of the intervening conductive layer isconvex, and the bottom surface of the top conductive plug is concave. 4.The semiconductor device of claim 2, wherein the top surface of thefirst portion of the intervening conductive layer is concave, and thebottom surface of the top conductive plug is convex.
 5. Thesemiconductor device of claim 2, wherein a bottom surface of theintervening conductive layer is substantially planar and sidewalls ofthe intervening conductive layer are tapered along a vertical direction.6. The semiconductor device of claim 5, wherein an angle between thesidewalls of the intervening conductive layer and the bottom surface ofthe intervening conductive layer is between 60 degree and about 80degree.
 7. The semiconductor device of claim 1, wherein an aspect ratioof the bottom conductive plug is less than about 1:4.
 8. Thesemiconductor device of claim 7, wherein an aspect ratio of the topconductive plug is less than about 1:4.
 9. The semiconductor device ofclaim 8, wherein a ratio of a radius of curvature of the top surface ofthe intervening conductive layer to a height of the interveningconductive layer is between about 1:1 and about 1:4.
 10. Thesemiconductor device of claim 9, wherein a ratio of the height of theintervening conductive layer to a height of the top conductive plug isbetween about 1:3 and about 1:6.
 11. The semiconductor device of claim4, wherein the top surface of the first portion is concave and a bottomsurface of the second portion is concave.
 12. The semiconductor deviceof claim 3, wherein a central line of the top conductive plug is offsetfrom a central line of the intervening conductive layer.